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Cymer, Inc.
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#	Item
11	PROJECT RESULT Lithography T405: EUV sources development (EUV Sources) Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:39:57 Microtechnology Extreme ultraviolet Photolithography Ultraviolet Photomask Stepper Laser Semiconductor device fabrication Cymer Inc. Electromagnetic radiation Extreme ultraviolet lithography Technology
12	A DECADE OF SOLID STATE PULSED POWER DEVELOPMENT AT CYMER INC. R. Ness, P. Melcher, G. Ferguson, and C. Huang Cymer Inc., 17075 Thornmint Court, San Diego, CA 92127, USA Abstract Add to Reading List Source URL: www.nessengr.com Language: English - Date: 2008-11-08 13:32:49 Power electronics Pulsed power Power supply Capacitor Extreme ultraviolet lithography Transformer Insulated gate bipolar transistor Electronic test equipment Radio electronics Electrical engineering Electromagnetism Technology
13	Chronology of Lithography Milestones Version 0.9 Add to Reading List Source URL: www.lithoguru.com Language: English - Date: 2012-04-29 13:05:50 Cymer Inc. Stepper Photolithography Nikon Krypton fluoride laser Microelectromechanical systems Excimer laser Semiconductor device fabrication Applied Materials Materials science Technology Microtechnology
14	Laser Produced Plasma EUV Sources for Device Development and HVM David C. Brandt, Igor V. Fomenkov, Michael J. Lercel, Bruno M. La Fontaine, David W. Add to Reading List Source URL: www.cymer.com Language: English* - Date: 2012-05-17 13:30:57 Extreme ultraviolet lithography Cymer Inc. Extreme ultraviolet Mechanical engineering Laser Plasma Microelectromechanical systems Physics Materials science Electromagnetic radiation

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